CAS: 1586-73-8 Molecular Formula: C9H27NSi3 Molecular Weight (g/mol): 233.58 MDL Number: MFCD00047990 InChI Key: PEGHITPVRNZWSI-UHFFFAOYSA-N PubChem CID: 74110 IUPAC Name: [[bis(trimethylsilyl)amino]-dimethylsilyl]methane SMILES: C[Si](C)(C)N([Si](C)(C)C)[Si](C)(C)C